Frequency-tuning Matching Network for Load-varying Applications

Abstract

We propose a general method to design two-port matching networks that can match a varying load impedance to a fixed source impedance by adjusting the frequency. The matching network consists of two stages: a frequency-tuning resistance compression network and a reactance neutralization network. An example circuit is implemented to drive a practical varying plasma impedance while achieving less than 0.12 reflection coefficient within 0.6 MHz tuning bandwidth.